IN-CHAMBER ELECTRON DETECTOR
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United States of America Patent
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Issued Date -
Aug 9, 2012
app pub date -
Apr 18, 2012
filing date -
Jun 18, 2007
priority date (Note) -
Abandoned
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Abstract
A secondary particle detector 302 for a charged particle beam system 300 includes a scintillator 304 and a transducer 312, such as a photomultiplier tube, positioned within a vacuum chamber 107. Unlike prior art Everhart-Thornley detectors, the photomultiplier is positioned within the vacuum chamber, which improves detection by eliminating optical couplings and provides flexibility in positioning the detector.
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