ADVANCED FEED-FORWARD VALVE-CONTROL FOR A MASS FLOW CONTROLLER
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United States of America Patent
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Issued Date -
Aug 2, 2012
app pub date -
Dec 1, 2011
filing date -
Dec 1, 2010
priority date (Note) -
Abandoned
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Abstract
The disclosed embodiments include a method, apparatus, and computer program product for measuring and controlling gas and/or liquid flow. In particular, embodiments of the invention provide advanced feed-forward valve-control for a mass flow controller for placing a proportional control valve in its expected position in response to a change in customer set point and/or an inlet pressures. In addition, the disclosed embodiments also provide independent ‘corroboration’ of the measured flow by a thermal mass flow sensor.
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