ZIRCONIUM, HAFNIUM AND TITANIUM PRECURSORS FOR ATOMIC LAYER DEPOSITION OF CORRESPONDING METAL-CONTAINING FILMS

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Issued Date
Aug 2, 2012
app pub date
Jan 27, 2012
filing date
Jan 27, 2011

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A zirconium precursor selected from among compounds of Formulae (I), (II) and (III):

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ADVANCED TECHNOLOGY MATERIALS INC	7 COMMERCE DRIVE DANBURY CT 06810

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Inventor Name	Address	# of filed Patents	Total Citations
Cameron, Thomas M	Newtown, US	58	1153
Hunks, William	Waterbury, US	30	1279
Xu, Chongying	New Milford, US	153	7154

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ZIRCONIUM, HAFNIUM AND TITANIUM PRECURSORS FOR ATOMIC LAYER DEPOSITION OF CORRESPONDING METAL-CONTAINING FILMS

Number of patents in Portfolio can not be more than 2000

United States of America Patent

13360453

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13360453

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