Optical beam control based on flexure actuation with positioning sensing and servo control
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United States of America Patent
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Sep 25, 2012
Grant Date -
Aug 2, 2012
app pub date -
Sep 23, 2011
filing date -
Jan 28, 2011
priority date (Note) -
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Abstract
Implementations of actuators that use flexures to provide support to actuators and pivoting mechanisms to the actuators. Such actuators can be electromagnetically activated actuators that include a magnet stator and a coil rotor mounted on a flexure. A positioning sensor, such as a capacitor sensor, is provided to measure and monitor positioning of the actuator and is coupled to a feedback circuit which uses the measured positioning of the actuator to control the actuator.
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