PREVENTING CONTACT STICTION IN MICRO RELAYS
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United States of America Patent
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Issued Date -
Aug 2, 2012
app pub date -
Feb 1, 2011
filing date -
Feb 1, 2011
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A micro relay of a micro-electro-mechanical system (MEMS), includes a cap substrate, a first electrical contact, an actuator, and a second electrical contact. The first electrical contact is formed on the cap substrate, includes a platinum group metal, and includes a first surface layer of an oxide of the platinum group metal. The second electrical contact is formed on the actuator, includes the platinum group metal, and includes a second surface layer of the oxide of the platinum group metal. At least a first portion of the first surface layer contacts at least a second portion of the second surface layer during cycling of the micro relay.
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