IMAGERS WITH BURIED METAL TRENCHES AND THOUGH-SILICON VIAS

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United States of America Patent

APP PUB NO 20120193744A1
SERIAL NO

13185366

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An imaging system may include an imager with frontside components such as imaging pixels and backside components. The backside components may include at least a first redistribution layer having metal trenches and through-silicon vias (TSVs) that couple at least some of the backside components to the frontside components. The metal trenches and through-silicon vias may be formed simultaneously. The through-silicon vias may have a width greater than the width of the metal trenches. The greater width of the through-silicon vias may facilitate forming the through-silicon vias simultaneously with the metal trenches.

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Patent Owner(s)

Patent OwnerAddress
APTINA IMAGING CORPORATIONWALKER HOUSE 87 MARY STREET GEORGE TOWN GRAND CAYMAN KY1-9002

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Borthakur, Swarnal Boise, US 105 869
Farnworth, Warren M Nampa, US 855 33798
Perkins, Andrew Boise, US 54 887
Sulfridge, Marc Boise, US 37 720

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