METHOD FOR DETERMINING PROCESS-SPECIFIC DATA OF A VACUUM DEPOSITION PROCESS
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United States of America Patent
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Issued Date -
Aug 2, 2012
app pub date -
Jan 5, 2012
filing date -
Jan 27, 2011
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Abandoned
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Abstract
A method for determining process-specific data of a vacuum deposition process, in which a substrate is coated in a vacuum chamber by a material detached from a target connected to a magnetron, an optical emission spectrum being recorded and process-significant data of the vacuum deposition process being determined therefrom for further processing in measurement or regulating processes, is optimized to minimize errors in the determination of process-significant data. At least three intensities of spectral lines of at least two process materials are determined from the optical emission spectrum. From these, single and multiple intensities are mathematically correlated with and to one another and a process-significant datum, which is used in subsequent measurement or regulating processes, is determined from the relation results by a further mathematical relation.
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