Demodulator Using MEMS Chip for Adjusting The Phase
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United States of America Patent
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Issued Date -
Jul 19, 2012
app pub date -
Dec 29, 2010
filing date -
Dec 29, 2010
priority date (Note) -
Abandoned
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Abstract
The present patent application provides a demodulator using MEMS chip for adjusting the phase, which comprises a first interferometer. The difference of the first optical path and the second optical path is an integer multiple of the light speed. A MEMS chip is arranged in at least one optical path of the first interferometer, the MEMS chip is used to adjust the phase of the interference light. The present patent application using MEMS chip for adjusting the phase and phase difference, and also monitor the location of the output beam waveform of the first interferometer and the second interferometer to guide the MEMS chip adjusting the phase difference of the two optical paths. Therefore the adjusting of the phase is more precise by using MEMS chip.
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