METAL OXIDE-METAL COMPOSITE SPUTTERING TARGET
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United States of America Patent
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Issued Date -
Jul 19, 2012
app pub date -
Sep 15, 2010
filing date -
Sep 18, 2009
priority date (Note) -
Abandoned
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Abstract
Disclosed is a metal oxide-metal composite sputtering target which is useful for the formation of a recording layer for an optical information recording medium, said recording layer containing a metal oxide and a metal. Specifically disclosed is a composite sputtering target containing a metal oxide (A) and a metal (B), wherein the maximum value of the circle-equivalent diameter of the metal oxide (A) is controlled to 200 μm or less.
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