LIQUID CHEMICAL DISCHARGE VALVE AND LIQUID CHEMICAL SUPPLY SYSTEM
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United States of America Patent
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Issued Date -
Jul 12, 2012
app pub date -
Jan 5, 2012
filing date -
Jan 12, 2011
priority date (Note) -
Abandoned
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Abstract
A liquid chemical discharge valve which includes a diaphragm valve having a contact portion for varying that varies a flow condition between the liquid chemical supply port and the liquid chemical discharge port by manipulating a lift amount, which is a distance between the contact portion and one of the liquid chemical supply port and the liquid chemical discharge port, between a closed valve condition and a maximum lift amount. The liquid chemical discharge valve includes an actuator unit for driving the contact portion in accordance with a supply pressure of the operating gas supplied from the operating gas supply port, to thereby manipulate the lift amount. The actuator unit includes a lift amount limiting unit for limiting the maximum lift amount adjustably.
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