Implementation of Transmission and Control Platform for Equipment Front End Module of Semiconductor Production System
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United States of America Patent
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Issued Date -
Jul 5, 2012
app pub date -
Mar 28, 2011
filing date -
Dec 30, 2010
priority date (Note) -
Abandoned
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Abstract
A method of platformization of an equipment front end module of a semiconductor production system includes the steps of: establishing a subsystem management module, a communication interface module, a parse module, and a network communication module; directing the command by the communication interface module to the subsystem management module; analyzing the command by the subsystem management module and sending the command to the corresponding subsystem module; sending the command from the corresponding subsystem module to the controller of the equipment front end module through the network communication module; and analyzing message by the parse module, sending a feedback to the corresponding subsystem module, and then sending the feedback to the control system of the semiconductor production system through the communication interface module. The present invention provides a standardized software interface to standardize different IC equipment control systems and to enhance the production efficiency of the system.
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