MEMS Spatial Light Modulator Driver Calibration Systems
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United States of America Patent
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Issued Date -
Jul 5, 2012
app pub date -
Dec 31, 2010
filing date -
Dec 31, 2010
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Abandoned
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Abstract
We describe a method of compensating for long-term mechanical property changes in an analogue optical MEMS SLM. In embodiments the SLM comprises multiple piston-type actuation optical phase modulating pixels each having a mirror with a variable height determined by an analogue voltage applied to a corresponding pixel electrode. The method comprises performing initial calibrations of the analogue displacement and pixel capacitance versus analogue voltage to determine a relationship between the pixel capacitance and analogue displacement, and then updating the displacement-voltage capacitance using the initial calibration data and a later calibration of the analogue voltage-capacitance characteristic of a pixel.
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