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Abstract

We describe an analogue optical MEMS spatial light modulator (SLM) comprising optical phase modulating MEMS pixels each with a pixel electrode and a mirror mounted on a spring such that said mirror is able to translate in a direction perpendicular to said substrate substantially without tilting, under the influence of a voltage applied to said pixel electrode. The CMOS substrate comprises an analogue pixel driver circuit for each of the pixels to apply an analogue voltage to the pixel electrode. The analogue pixel driver circuit comprises a pixel voltage input to receive an analogue voltage, a first and second sample/hold circuits coupled to the pixel voltage input, and a multiplexer having respective inputs coupled to said first and second sample/hold circuits, an output coupled to the pixel electrode, and a select line to control said multiplexer to selectively couple said first and second S/H circuits to the pixel electrode.

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First Claim