VACUUM ULTRAVIOLET LIGHT EMITTING DEVICE
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United States of America Patent
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Issued Date -
Jun 28, 2012
app pub date -
Sep 6, 2010
filing date -
Sep 7, 2009
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Abandoned
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Abstract
A vacuum ultraviolet light emitting device comprising: a luminescence substrate which is composed of a transparent substrate of lithium fluoride, magnesium fluoride, calcium fluoride, barium fluoride or the like, and a metal fluoride thin-film layer formed on the transparent substrate and being a thin-film layer of a metal fluoride such as LuLiF4, LaF3, BaF2 or CaF2, the metal fluoride being doped with atoms of neodymium (Nd), thulium (Tm), erbium (Er) or the like; and an electron beam source such as a thermionic emission gun or a field emission gun, wherein the luminescence substrate and the electron beam source are disposed in a vacuum atmosphere, and the metal fluoride thin-film layer is irradiated with electron beams from the electron beam source to emit light including wavelength components of vacuum ultraviolet light.
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