MAGNETRON ARRANGEMENT WITH A HOLLOW TARGET
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United States of America Patent
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Issued Date -
Jun 21, 2012
app pub date -
Dec 21, 2011
filing date -
Feb 21, 2010
priority date (Note) -
Abandoned
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Abstract
A magnetron arrangement includes a hollow target and a magnet system arranged in the hollow target with a magnet carrier and a magnet arrangement fitted on the magnet carrier. The magnet carrier includes at least two magnet carrier elements, which each have at least one cavity and each have at least one contact face on an outer side. The at least two magnet carrier elements are in touching contact with their contact faces and are fixedly connected to one another, and the cavities of the magnet carrier elements have no connection between them.
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