Imprint method, computer storage medium and imprint apparatus
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United States of America Patent
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Jun 25, 2013
Grant Date -
Jun 21, 2012
app pub date -
Aug 25, 2010
filing date -
Sep 2, 2009
priority date (Note) -
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Abstract
The present invention provides a method for applying an application liquid between a template and a substrate, and transferring the transfer pattern onto the application liquid. The template is inclinedly arranged with respect to the substrate in a manner that a first distance between a first end portion of the template and the substrate is a distance that causes a capillary action of the application liquid to occur, and a second distance between a second end portion of the template that opposes the first end portion and the substrate is a distance that does not cause the capillary action of the application liquid to occur. Thereafter, the application liquid is supplied from an outer side of the first end portion to the first end portion. Thereafter, the second end portion and the substrate are relatively moved so that the second distance becomes equal to the first distance.
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