METHOD OF MAKING AN ELECTRICALLY CONDUCTIVE STRUCTURE, METHOD OF MAKING A GAS SENSOR, GAS SENSOR OBTAINED WITH THE METHOD AND USE OF THE GAS SENSOR FOR SENSING A GAS

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United States of America Patent

APP PUB NO 20120151997A1
SERIAL NO

13329029

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method of making an electrically conductive structure in a surface portion of a dielectric material is disclosed. In one aspect, the method includes creating vacancies at at least part of an exposed surface of the dielectric material by removing atoms from a plurality of molecules of the dielectric material.

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Patent Owner(s)

Patent OwnerAddress
STICHTING IMEC NEDERLANDHIGH TECH CAMPUS 31 EINDHOVEN 5656 AE

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Brongersma, Sywert Eindhoven, NL 9 37
Calama, Mercedes Crego Geldrop-Mierlo, NL 7 79
Kochupurackal, Jinesh Singapore, SG 5 38

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