APPARATUS FOR OBTAINING PLANARITY MEASUREMENTS WITH RESPECT TO A PROBE CARD ANALYSIS SYSTEM
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United States of America Patent
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Issued Date -
Jun 14, 2012
app pub date -
Jun 14, 2011
filing date -
Mar 14, 2003
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Abandoned
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Abstract
A system and method of mitigating the effects of component deflections in a probe card analyzer system may implement three-dimensional comparative optical metrology techniques to model deflection characteristics. An exemplary system and method combine non-bussed electrical planarity measurements with fast optical planarity measurements to produce “effectively loaded” planarity measurements.
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