METHOD FOR PRODUCING ULTRA-PURE AQUEOUS HYDROGEN PEROXIDE SOLUTION

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United States of America Patent

APP PUB NO 20120148482A1
SERIAL NO

12982771

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Abstract

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The present invention provides a method for continuous production of ultra-pure aqueous hydrogen peroxide solution. Industrial grade aqueous hydrogen peroxide solution as raw material is pretreated by macroporous adsorption resin, and then is brought into contact with a cation exchange resin, anion exchange resin to the first ion exchange. Then the material is brought into contact with multi-stage mixed cation and anion exchange resin columns, and is filtered by ultrafilter to obtain ultra-pure aqueous hydrogen peroxide solution. The method provided by the present invention has high security, simple operation, stable quality of product, and is suitable for continuously produce on a large scale.

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Patent Owner(s)

Patent OwnerAddress
SHANGHAI HUAYI MICROELECTRONIC MATERIAL CO LTDNO 3 TIELI ROAD SHANGHAI 200940

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Tang, Hui Shanghai, CN 86 705
Zhan, Jiarong Shanghai, CN 7 9

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