MICROELECTROMECHANICAL SYSTEM DEVICE AND SEMI-MANUFACTURE AND MANUFACTURING METHOD THEREOF

United States of America Patent

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Issued Date
Jun 14, 2012
app pub date
Nov 15, 2011
filing date
Dec 10, 2010

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Abandoned

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Abstract

A manufacturing method of the MEMS device disposes a conductive circuit to maintain various elements of the MEMS equi-potential thereby preventing electrostatic damages to various elements of the MEMS during the manufacturing process.

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MIRADIA INC	2880 LAKESIDE DRIVE SUITE 260 SANTA CLARA CA 95054

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Inventor Name	Address	# of filed Patents	Total Citations
CHIEN, YU-HAO	TAIPEI CITY, TW	16	147
CHUNG, SHIH-YUNG	HSINCHU COUNTY, TW	4	112
TSENG, LI-TIEN	TAOYUANG COUNTY, TW	27	248
WU, HUA-SHU	HSINCHU CITY, TW	31	324
YEH, YU-TE	TAICHUNG COUNTY, TW	7	123

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MICROELECTROMECHANICAL SYSTEM DEVICE AND SEMI-MANUFACTURE AND MANUFACTURING METHOD THEREOF

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United States of America Patent

13296366

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13296366

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