Method for producing electronic grade aqueous ammonium fluoride solution
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United States of America Patent
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Issued Date -
Jun 14, 2012
app pub date -
Dec 20, 2010
filing date -
Dec 8, 2010
priority date (Note) -
Abandoned
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Abstract
The present invention relates to a method for producing of electronic grade aqueous ammonium fluoride solution. The industrial grade liquid ammonia is used as the raw material, when it is heated, the ammonia gas will be released. The organic gas impurities in the ammonia gas are removed by activated charcoal, and the oxygen is removed by deoxidizer, and then the high-purity ammonia gas is gotten. The high-purity hydrofluoric acid absorbs and reacts with the high-purity ammonia gas to obtain the electronic grade aqueous ammonium fluoride solution. The product has high-purity and stable quality, and it can be used in producing of electronic products directly. The method for producing of electronic grade ammonium aqueous fluoride solution provided by the present invention is suitable for continuous production on a large scale because of its simple operation.
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