METHOD FOR FABRICATING AT LEAST ONE DETECTOR PIXEL CELL, SENSOR COMPRISING AT LEAST ONE SUCH CELL
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United States of America Patent
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Issued Date -
Jun 7, 2012
app pub date -
Dec 6, 2011
filing date -
Dec 7, 2010
priority date (Note) -
Abandoned
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Abstract
The invention concerns a method for fabricating at least one detector pixel cell (45) connected to an element (82) formed in a weakly doped silicon substrate (81), characterized in that it comprises:
- firstly, a first step to fabricate at least one layer (61) by implantation doping and activation annealing,secondly, a second step to fabricate at least one connection node (85) in a circuit (83), from an element (82) formed in the substrate (81) by dry etching and metallization,a step to combine, by bonding, the fabricated doped layer (61) with the fabricated connection node (85); anda step to individualize at least one pixel cell (45) in the doped layer (61) by dry etching; anda passivation and opening step opposite the individualized cell (45), by dry etching.
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