OPTICAL PROBING IN ELECTRON MICROSCOPES
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United States of America Patent
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Issued Date -
Jun 7, 2012
app pub date -
Apr 15, 2010
filing date -
Apr 15, 2009
priority date (Note) -
Abandoned
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Abstract
The present invention relates to an optical arrangement and in particular to an optical arrangement for use in electron microscopy applications. This is used for sample characterization with simultaneous measurement with the electron microscopy of the sample and measurements with an optical setup and/or using a manipulator for probing of a light source or a scanning probe device.
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