SYSTEMS AND METHODS FOR MOVING WEB ETCH, CVD, AND ION IMPLANT
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United States of America Patent
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Issued Date -
Jun 7, 2012
app pub date -
Dec 6, 2011
filing date -
Dec 6, 2010
priority date (Note) -
Abandoned
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Abstract
Systems and methods for moving substrates through process chambers for photovoltaic (PV) or solar cell applications are disclosed. In particular, systems and methods for moving substrates through process chambers using a conveyor belt are disclosed. The conveyor belt can be used to move the substrates through etch chambers, chemical vapor deposition (CVD) chambers, and/or ion implant chambers, and the like.
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