Optical inspection system and method

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United States of America Patent

PATENT NO 8368881
APP PUB NO 20120133760A1
SERIAL NO

13277986

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An inspection system includes optics, an object support for mounting an object in a region of an object plane of the optics, a bright-field light source, and a dark-field light source. The inspection system also includes an image detector having a radiation sensitive substrate disposed in a region of an image plane of the optics and a beam dump.

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Patent Owner(s)

Patent OwnerAddress
NANDA TECHNOLOGIES GMBHUNTERSCHLEISSHEIM

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chhibber, Rajeshwar San Jose, US 21 1742
Eckerl, Klaus Hutthurm, DE 9 61
Harendt, Norbert Hutthurm, DE 7 39
Markwort, Lars Haimhausen, DE 17 672

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Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges26316394571961235940442415163901 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7071 - 8081 - 9091 - 100100 +0100200300400500600700800900100011001200130014001500160017001800

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