Process to make PMR writer with leading edge shield (LES) and leading edge taper (LET)
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United States of America Patent
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Sep 3, 2013
Grant Date -
May 24, 2012
app pub date -
Nov 24, 2010
filing date -
Nov 24, 2010
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Abstract
Methods for fabrication of leading edge shields and tapered magnetic poles with a tapered leading edge are provided. The leading edge shield may be formed by utilizing a CMP stop layer. The CMP stop layer may aid in preventing over polishing of the magnetic material. For the tapered magnetic poles with a tapered leading edge, a magnetic material is deposited on a planarized surface, a patterned resist material is formed, and exposed magnetic material is etched to form at least one tapered surface of the magnetic material.
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