VIBRATING GYROSCOPE INCLUDING PIEZOELECTRIC FILM
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United States of America Patent
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Issued Date -
May 24, 2012
app pub date -
May 13, 2010
filing date -
Jul 27, 2009
priority date (Note) -
Abandoned
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Abstract
A vibrating gyroscope according to this invention includes a ring-shaped vibrating body 11 having a uniform plane, leg portions 15 flexibly supporting the ring-shaped vibrating body, a plurality of electrodes 13a, 13b, . . . , 13h that are disposed on the plane of or above the ring-shaped vibrating body and are formed with one of an upper-layer metallic film and a lower-layer metallic film, and a piezoelectric film being sandwiched between the upper-layer metallic film and the lower-layer metallic film in a thickness direction thereof. When one of the driving electrodes 13a for exciting a primary vibration of the ring-shaped vibrating body 11 in a vibration mode of cos Nθ is referred to as a reference driving electrode, the remaining plurality of electrodes 13b, . . . , 13h are disposed at specific positions. Such disposition allows this vibrating gyroscope to detect a secondary vibration inclusive of an out-of-plane vibration mode. A voltage for suppressing the secondary vibration is applied to a suppression electrode 13j.
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