MASS FLOW CONTROLLER
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United States of America Patent
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Issued Date -
May 10, 2012
app pub date -
Nov 7, 2011
filing date -
Nov 8, 2010
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
The present invention comprises a flow rate sensor part and control valve; a calculation part that performs a proportional calculation on a deviation between a flow rate measurement value and setting value to calculate a feedback control value for the flow rate control valve; and an opening level control signal output part that generates an opening level control signal on the basis of the feedback control value to output the opening level control signal to the flow rate control valve. A gain value to be multiplied by the deviation is calculated by using a function that, in a predetermined period after the time point when the flow rate setting value decreases by a predetermined amount or more, calculates a larger value as a calculation value obtained by using a variation between the flow rate setting value before the decrease and a flow rate setting value after the decrease decreases.
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