Production of Polycrystalline Silicon By The Thermal Decomposition of Trichlorosilane In A Fluidized Bed Reactor
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United States of America Patent
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Issued Date -
Apr 26, 2012
app pub date -
Oct 22, 2010
filing date -
Oct 22, 2010
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Abandoned
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Abstract
Processes for producing polycrystalline silicon by thermal decomposition of trichlorosilane are disclosed. The processes generally involve thermal decomposition of trichlorosilane in a fluidized bed reactor operated at reaction conditions that result in a high rate of productivity relative to conventional production processes.
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