BANDWIDTH NARROWING MODULE FOR SETTING A SPECTRAL BANDWIDTH OF A LASER BEAM

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United States of America Patent

APP PUB NO 20120099612A1
SERIAL NO

13238470

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Abstract

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The disclosure provides a bandwidth narrowing module for setting a spectral bandwidth of a laser beam of a laser light source. The bandwidth narrowing module includes a beam expanding module for expanding a laser beam transversely with respect to a propagation direction of the laser beam and comprising a reflection grating. A first optical component of the bandwidth narrowing module is configured so that a disturbance with a cylindrical portion about a first axis transversely with respect to an optical axis of the bandwidth narrowing module can be impressed on a wavefront of a laser beam. The first optical component is embodied such that it is pivotable about a pivoting axis parallel to the first axis.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS LASER OPTICS GMBH73447 OBERKOCHEN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Deubel, Markus Aalen, DE 4 7
Lengel, Anton Oberkochen, DE 2 26

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