SIMPLIFIED PARTICLE EMITTER AND METHOD OF OPERATING THEREOF
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United States of America Patent
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N/A
Issued Date -
Apr 19, 2012
app pub date -
Oct 22, 2010
filing date -
Oct 19, 2010
priority date (Note) -
Abandoned
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Abstract
An emitter assembly for emitting a charged particle beam along an optical axis is described. The emitter assembly being housed in a gun chamber and includes an emitter having an emitter tip, wherein the emitter tip is positioned at a first plane perpendicular to the optical axis and wherein the emitter is configured to be biased to a first potential, an extractor having an opening, wherein the opening is positioned at a second plane perpendicular to the optical axis and wherein the extractor is configured to be biased to a second potential, wherein the second plane has a first distance from the first plane of 2.25 mm and above.
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