REACTOR DEVICE WITH REMOVABLE DEPOSITION MONITOR
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United States of America Patent
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app pub date -
Dec 23, 2011
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Dec 2, 2005
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Abandoned
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Abstract
A reactor apparatus includes a first chamber coupled to a first source of vacuum, a monitor chamber isolated from the first chamber and coupled to a second source of vacuum, and at least one removable deposition monitor disposed in the monitor chamber.
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