WORKPIECE CARRIER AND DEPOSITION DEVICE HAVING SAME
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United States of America Patent
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Issued Date -
Apr 19, 2012
app pub date -
Jan 28, 2011
filing date -
Oct 15, 2010
priority date (Note) -
Abandoned
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Abstract
A workpiece carrier includes a first carrier and a second carrier. The first carrier includes a plurality of first posts substantially parallel to each other. Each of the first posts is rotatable about a central axis thereof. The second carrier includes a plurality of second posts substantially parallel to each other. Each of the second posts is rotatable about a central axis thereof. The first carrier surrounds the second carrier therein. The workpiece carrier further includes at least one connecting arm interconnected between the first carrier and the second carrier, such that the first carrier and the second carrier are jointly rotatable about a rotation axis.
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