NANOIMPRINT METHOD

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United States of America Patent

APP PUB NO 20120090489A1
SERIAL NO

13229234

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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According to one embodiment, a nanoimprint method includes: performing imprinting by use of a first template, to form a pattern on a first substrate to be transferred; measuring an alignment deviation of the pattern with respect to the first substrate to be transferred; performing alignment-deviation correction based on the measured alignment deviation, to produce a third template by use of the first template; and performing imprinting by use of the third template, to form a pattern on a second substrate to be transferred.

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Patent Owner(s)

Patent OwnerAddress
KABUSHIKI KAISHA TOSHIBA1-1 SHIBAURA 1-CHOME MINATO-KU TOKYO 105-0023

International Classification(s)

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  • 2011 Application Filing Year
  • B41F Class
  • 243 Applications Filed
  • 175 Patents Issued To-Date
  • 72.02 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances20112012201320142015201620172018201920202021202220230255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kasa, Kentaro Kawasaki-Shi, JP 17 42
Mikami, Shinji Kawasaki-Shi, JP 28 241
SUZUKI, Masato Yokoham-shi, JP 405 3732

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Patent Citation Ranking

  • 2 Citation Count
  • B41F Class
  • 8.97 % this patent is cited more than
  • 13 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges28225421051101 - 1011 - 2021 - 3031 - 4041 - 50100 +0102030405060708090100110120130140150160170180190200210220230240

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