DATA INTERPOLATION METHODS FOR METROLOGY OF SURFACES, FILMS AND UNDERRESOLVED STRUCTURES
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United States of America Patent
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Issued Date -
Apr 12, 2012
app pub date -
Oct 6, 2011
filing date -
Oct 8, 2010
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Abandoned
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Abstract
A method includes fitting a function to a subset of reflectivity data comprising values for the reflectivity of a test object for different wavelengths, different scattering angles, and/or different polarization states; determining values for the function at certain wavelengths and scattering angles and/or polarization states; and determining information about the test object based on the determined values.
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