GAS DISCHARGE PIPE AND ASSOCIATED METHOD
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United States of America Patent
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Issued Date -
Apr 12, 2012
app pub date -
Oct 6, 2011
filing date -
Oct 8, 2010
priority date (Note) -
Abandoned
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Abstract
The embodiments of the present invention describe a gas discharge pipe comprising a first discharge channel and at least one second discharge channel designed to be connected respectively to a first vacuum pump and to at least a second vacuum pump on the one hand and to a reactor outlet on the other hand, in which the first discharge channel and at least the second discharge channel comprise first means and at least second means for injecting an inert gas in which the direction of injection is respectively oriented opposite to the direction of suction of the vacuum pumps.
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