BULK ACOUSTIC WAVE RESONATOR AND BULK ACOUSTIC WAVE FILTER AND METHOD OF FABRICATING BULK ACOUSTIC WAVE RESONATOR
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United States of America Patent
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Issued Date -
Apr 12, 2012
app pub date -
Jan 26, 2011
filing date -
Oct 11, 2010
priority date (Note) -
Abandoned
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Abstract
A bulk acoustic wave (BAW) resonator includes a substrate, and two electrodes stacked on the substrate, and at least one piezoelectric layer interposed between the two electrodes. The two electrodes and the piezoelectric layer are at least partially overlapped with each other in a vertical projection direction, and one of the two electrodes has a plurality of openings.
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