MEMS DEVICE AND COMPOSITE SUBSTRATE FOR AN MEMS DEVICE
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United States of America Patent
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Issued Date -
Apr 12, 2012
app pub date -
Jun 27, 2011
filing date -
Oct 6, 2010
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Abandoned
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Abstract
An MEMS device and a composite substrate for an MEMS device are provided. The MEMS device comprises a first silicon structure layer and a second silicon structure layer fixedly connecting to the first silicon structure layer. The first silicon structure layer has a twistable rod and a first plane. The first silicon structure layer has a first crystal direction with a miller index of <100> and a second crystal direction with a miller index of <110>. The first crystal direction and the second crystal direction are both parallel to the first plane. The rod has an axis direction, which is parallel to the first plane and intersected by the second crystal direction. In this manner, the torsional stiffness of the rod can be improved.
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