Vertical cavity surface emitting laser and method for manufacturing the same
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United States of America Patent
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Issued Date -
Apr 5, 2012
app pub date -
Dec 8, 2010
filing date -
Sep 30, 2010
priority date (Note) -
Abandoned
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Abstract
A vertical cavity surface emitting laser capable of high-speed modulation and stabilized control of polarization direction of the laser light is provided, including a resonator which is formed by stacking a semiconductor substrate, a lower mirror layer formed on the upper side of the semiconductor substrate, an active layer formed on the upper side of the lower mirror layer, and an upper mirror layer including an oxidized layer formed on the upper side of the active layer, and a portion of which is formed in a mesa shape from a predetermined position to the upper surface in a height direction; an insulation layer covering the side surface of the mesa-shaped portion of the resonator, and the upper surface of the non-mesa-shaped portion of the resonator; and electrodes being wired on the upper surface of the upper mirror layer and on the lower surface of the semiconductor substrate, respectively. Further, a portion of the insulation layer formed on the side surface of the mesa-shaped portion of the resonator is formed to be uniformly thicker than another portion along the height direction of the mesa-shaped portion.
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