METHOD AND SYSTEM FOR PREPARING A LAMELA
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United States of America Patent
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Issued Date -
Apr 5, 2012
app pub date -
Jun 30, 2011
filing date -
Jul 6, 2010
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A system and a method for preparing a lamella. The method may include aligning, by the manipulator, a mask and a sample. Positioning the mask and the sample in front of an ion miller while unchanging the spatial relationship between the mask and the sample. Milling a first exposed portion of the sample until exposing a first sidewall of the lamella. Positioning the mask and the sample in front of the ion miller so that the mask masks a second masked portion of the sample. Milling, by the ion miller, the second exposed portion of the sample until exposing a second sidewall of the lamella. Removing, by the miller, matter from both sides of the lamella; and detaching the lamella from the sample.
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