SINGLE MATCHING NETWORK FOR MATCHING MULTI-FREQUENCY AND METHOD OF CONSTRUCTURING THE SAME AND RADIO FREQUENCY POWER SOURCE SYSTEM USING THE SAME
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
Mar 29, 2012
app pub date -
Sep 21, 2011
filing date -
Sep 29, 2010
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A single matching network is adapted to input at least two frequencies, which is used to selectively provide an RF power match at any one of the at least two frequencies to a plasma load, and the single matching network includes an input terminal connected to a multi-frequency input and an output terminal connected to the plasma load. A capacitor and an inductor connected in series with each other are provided between the input terminal and the output terminal to form a branch, the capacitance value of the capacitor is C0, and the inductance value of the inductor is Lo, wherein, the capacitance value C0 and the inductance value L0 satisfy the following relations:
First Claim
Family
International Classification(s)
- [Classification Symbol]
- [Patents Count]
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully