METHOD OF FORMING A NOZZLE CHAMBER INCORPORATING AN INK EJECTION PADDLE AND NOZZLE CHAMBER RIM
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United States of America Patent
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app pub date -
Nov 14, 2011
filing date -
Apr 18, 2000
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Abandoned
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Abstract
A method of forming a printhead nozzle chamber includes steps of forming a first laminate of sacrificial layers on a substrate, the first laminate of sacrificial layers being formed as a ring on the substrate; hard-baking the first laminate of sacrificial layers to cause a shrinkage in the first laminate of sacrificial layers, the shrinkage further causing edges of the first laminate of sacrificial layers to angle inwards and form an approximate trapezoidal cross-section; depositing a TiN layer over the first laminate of sacrificial layer and the substrate, the TiN layer being inclined at portions deposited over the inwardly angled edges; etching the TiN layer to form a paddle and a nozzle chamber rim, the paddle incorporating an inner inclined portion and the nozzle chamber rim incorporating a complementary outer inclined portion, the paddle and nozzle rim defining an aperture therebetween; and removing the first laminate of sacrificial layers
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