Vapor Delivery System For Use in Imprint Lithography

United States of America Patent

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Issued Date
Mar 22, 2012
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Sep 8, 2011
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Sep 8, 2010

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Abstract

Described are systems and method of using a vapor delivery system for enabling delivery of an adhesion promoter material during an imprint lithography process.

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CITIBANK N A	388 GREENWICH STREET NEW YORK NY 10013

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Inventor Name	Address	# of filed Patents	Total Citations
Fletcher, Edward Brian	Austin, US	45	359
Jones, Christopher Ellis	Austin, US	13	105
LaBrake, Dwayne L	Cedar Park, US	41	653
Ramos, Rick	El Paso, US	3	2
Ye, Zhengmao	Austin, US	22	145

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Vapor Delivery System For Use in Imprint Lithography

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United States of America Patent

13228298

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13228298

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