METHOD AND APPARATUS FOR PRODUCING THREE DIMENSIONAL NANO AND MICRO SCALE STRUCTURES
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United States of America Patent
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Issued Date -
Mar 22, 2012
app pub date -
Mar 29, 2010
filing date -
Mar 31, 2009
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Abandoned
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Abstract
A three-dimensional milling method and apparatus is disclosed for milling micrometre and a nanometre scale three-dimensional structures. The apparatus includes an ion column operable to generate a milling beam onto a substrate held on an instrument stage. A patterning computer is operable to control the ion column to generate varying ion beam and/or dwell times or to produce a plurality of milling passes, in which subsequent passes overlap previous passes at least partially to create three-dimensional structures. Optionally, an SEM column may be provided.
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