EVAPORATION BOAT FOR VACUUM VAPOR DEPOSITION AND VACUUM VAPOR DEPOSITION SYSTEM
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United States of America Patent
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Issued Date -
Mar 22, 2012
app pub date -
Aug 27, 2011
filing date -
Sep 17, 2010
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
The present invention provides an evaporation boat, comprising: a source material container configured to contain source material and provided with an opening; a cover plate disposed, with a predetermined gap, above the opening of the source material container, wherein the vertical projection of the cover plate covers the opening of the source material container, so that the scattering range of the source material vapor formed by evaporating the source material is controlled by the cover plate as the source material vapor scatters through the predetermined gap to the outside of the evaporation boat; and a supporting member connecting the source material container and the cover plate to maintain a predetermined gap therebetween.
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