PHOTORESIST COMPOSITION AND METHOD OF FORMING PATTERN USING THE SAME

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United States of America Patent

APP PUB NO 20120064455A1
SERIAL NO

13179106

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Abstract

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A photoresist composition and method of forming a pattern using the same are provided. The photoresist composition includes a 60 to 90 wt % novolac resin, a diazide compound, an organic solvent, and an anticorrosive agent.

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Patent Owner(s)

Patent OwnerAddress
SAMSUNG TECHWIN CO LTDGYEONGNAM SOUTH KOREA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
KIM, Ki-Soo Changwon-si, KR 93 1517
LIM, Hyun-Tae Changwon-si, KR 2 33
YU, Dong-Guk Changwon-si, KR 1 1

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