METHODS OF CLEANING HARD DRIVE DISK SUBSTRATES FOR NANOIMPRINT LITHOGRAPHY
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United States of America Patent
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Issued Date -
Mar 8, 2012
app pub date -
Sep 7, 2011
filing date -
Sep 7, 2010
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Abandoned
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Abstract
Post sputter cleaning of hard disk substrates for use in an imprint lithography processes. The cleaning removes contaminants including organic contaminants that otherwise may cause repeating void (non-fill) defects in the imprinted pattern.
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