OPTICAL MEASURING SYSTEM WITH ILLUMINATION PROVIDED THROUGH A VOID IN A COLLECTING LENS
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United States of America Patent
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Issued Date -
Mar 8, 2012
app pub date -
Sep 8, 2010
filing date -
Sep 8, 2010
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Abandoned
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Abstract
An optical measuring system includes a scatterometer in which an illumination beam is provided through an aperture in a lens used to collect light for the scattering detection. The void may be a slit in the lens, a missing portion along an edge of the lens, or another suitable void. Another detection channel may be provided to detect light returning through the void in the collecting lens, for example, a profilometer may be implemented by detecting interference between reflected light returning along the illumination path and light from the illumination source.
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