OPTICAL MEASURING SYSTEM WITH MATCHED COLLECTION LENS AND DETECTOR LIGHT GUIDE
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United States of America Patent
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Issued Date -
Mar 8, 2012
app pub date -
Sep 8, 2010
filing date -
Sep 8, 2010
priority date (Note) -
Abandoned
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Abstract
An optical surface inspection system provides dark-field detection avoiding ghost images and without capturing, stray, reflected or re-scattered light. The system includes an illumination system that generates an illumination spot on a surface under inspection collecting lens that collects substantially all light scattered from the surface under inspection from the illumination spot. The system also includes a light guide with a first end having a numerical aperture matched to an exit aperture of the collecting lens and a field of view matched to the illumination spot, and a second end coupled to a detector.
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