MEMS Transducer for an Audio Device
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United States of America Patent
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Issued Date -
Mar 8, 2012
app pub date -
Mar 30, 2010
filing date -
Mar 31, 2009
priority date (Note) -
Abandoned
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Abstract
A MEMS transducer (10) for an audio device comprises a substrate (12), a membrane (14) attached to the substrate (12), and a back-electrode (18) attached to the substrate (12), wherein a resonant frequency of the back-electrode (18) is matched to a resonant frequency of the membrane (14). Further, a method of manufacturing a MEMS transducer (19) for an audio device comprises attaching a membrane to a substrate (12), attaching a back-electrode (18) to the substrate (12), matching a resonant frequency of the back-electrode (18) to a resonant frequency of the membrane (14).
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